The systems are equipped with 3 inch block manifold, roughing, and foreline valves. As in the high vacuum valve, the roughing and foreline valves are built around a vertical sealing plane to eliminate leaks caused by falling particles.
With over 250 square inches of cryogenic surface, the cold trap handles high volumes of condensable vapor. It has been specially designed to handle liquid nitrogen. Since typical holding time is from 10 to 14 hours, there is no need to interrupt a process cycle to refill the trap.
The CHA system is designed for overall efficiency. This includes fast cycle time, maximum wafer capacity, ease of reloading, convenient servicing, and long system life. For example, to clean or inspect the O-ring on the high vacuum valve it is only necessary the pull the quick-release pin in the valve shaft and remove the sealing plate through the port in the base plate.
All SE series systems may be equipped with planetary fixturing in either a 19.5 or 25.5 inch stainless steel bell jar. Also available is an 18-by-30 inch Pyrex bell jar which may be equipped with either planetary or static fixturing. All SE series systems also include an all stainless steel valve/trap assembly that is internally welded to prevent virtual leaks.
System Control Technology