MRC 943

New Sputtering System

MRC 943

As with the 903, the MRC 943 utilizes single pass deposition with a constant source to substrate distance. RF and DC capability exists at each cathode position. Various sizes of substrate can be processed.

High Vacuum Loadlock

The dual level cryopumped high vacuum loadlock makes the 943 a high throughput production system. The loadlock pumps down from atmosphere to 3x10-6 Torr in five minutes.

Production Automation

The 943 allows for fully automated production. With GE Fanuc PLC running the system's mechanical and electrical features, immediate notification is given when parameters vary unacceptably from user-present values.

System Control Technology
Tel: 925-373-9730   Fax: 925-373-9574   322 Lindbergh Avenue   Livermore, CA 94550