Refurbished Vacuum Systems

Airco-Temescal FC-1800

Evaporator system. With CTI-8 cryopump, auto cryo regeneration, rod fed electron beam gun, 10 kW power supply, X-Y beam sweep, GP 307 vacuum gauge, GE programmable controller.

CHA SE-600

Evaporator system. 10.5 inch diameter stainless steel water cooled chamber. With basic pumping package and auto valve sequence controller.

CHA SE-1000

Evaporator system. 25.5 inch diameter stainless steel water cooled chamber. With CTI-10 cryogenic pump, four pocket electron beam gun, 10 kW power supply, X-Y beam sweep, auto valve sequence controller.

CHA Mark-50

Evaporator system. E-beam evaporation source, Airco-Temescal CV-14 power supply with X-Y beam sweep, Inficon IC-6000, auto valve sequence controller, diffusion pump. CTI Cryogenic pump optional.

CPA 9900

Multi-target In-line sputtering system. Dual load-lock, RF/DC process, substrate heat.

CVC 601

Multi-target sputtering system. Load-lock chamber pumped with CTI-100 turbo pump, process chamber pumped with CTI-8 cryogenic pump, RF/DC process, substrate heat and etch.

MRC 822

Sputtersphere. Four target sputtering system, load-lock, diffusion pump, RF/DC process, substrate heat.

MRC 8667

Three target sputter system

MRC 902

Two target in-line sputter system. Load-lock, CTI-8 cryogenic pump, RF/DC process, substrate heat and etch, auto sequence controller.

MRC 942

Two target in-line sputter system. Load-lock and process chamber pumped with CTI-8 cryogenic pump, 10kW DC power supply, substrate heat.

MRC 903

Three target in-line sputter system. Load-lock, CTI-8 cryogenic pump, RF/DC process, substrate heat and etch, auto sequence controller.

MRC 943

Three target in-line sputter system. Load-lock and process chamber pumped with CTI-8 cryogenic pump, RF/DC process, substrate heat and etch.

Perkin Elmer 4410

Sputter system. Delta or 8 inch cathodes, CTI-8 cryogenic pump, RF/DC process.

Varian/NRC 3117

Evaporator. 19.5 x 30 inch CHA stainless steel water cooled bell jar, standard pumping package, e-gun and power supply.

Varian 3120

Evaporator. 25.5 inch diameter stainless steel water cooled bell jar, diffusion pump.

Varian 3125

Evaporator. 30 inch diameter horizontal stainless steel water cooled chamber. CTI-10 cryogenic pump, four pocket electron beam gun, 10kW electron beam power supply with X-Y beam sweep. Reactive ion.