The SCT Arrow in-line vertical sputtering system, a high throughput modular design with a pallet size of between 14 and 28 inches, which allows for the addition of deposition, isolation and magazine load-lock chamber modules as specific process requirements demand.
Sequence of multiple pallets are shown in red.
A robot arm loads pallet onto the pallet carrier as it prepares to unload a processed pallet at the return exit. This three dimensional rendering depicts one possible configuration with load and unload stations, load locks, pumping chambers, process chamber, and return carrier.
The load-lock modules and load and unload stations allow for continuous automatic, atmosphere-to-atmosphere processing of carriers through the system. The carriers are automatically fed into the load-lock entrance, then through the pumping chamber, and into the deposition chamber.
The addition of the pumping chamber allows for pallets to be positioned in the deposition chamber a mere few inches from each other, thereby optimizing throughput.
The deposition chamber can be configured with RF and DC cathodes, on one or both sides of the pallet, in whatever numbers necessary to complete the process in one pass. The modularity of the Arrow also allows for the addition of more cathodes as processes change and throughput demands increase.
Each opposing pair of cathodes has its own power supply and cryopump.
System Control Technology